1. Introduction. - 2. Methods of Preparation of Thin Films. - 2. 1 Chemical and Electrochemical Methods. - 2. 2 Cathode Sputtering. - 2. 3 Vacuum Evaporation. - 3. Thin Film Thickness and Deposition Rate Measurement Methods. - 3. 1 Balance Methods. - 3. 2 Electrical Methods. - 3. 3 Optical Methods. - 3. 4 Deposition Rate Monitoring Using Transfer of Momentum. - 3. 5 Special Thickness Monitoring Methods. - 4. Mechanism of Film Formation. - 4. 1 Formation Stages of Thin Films. - 4. 2 Nucleation. - 4. 3 Growth and Coalescence of Islands. - 4. 4 Influence of Various Factors on Final Structure of Film. - 4. 5 Crystallographic Structure of Thin Films. - 4. 6 Epitaxial Films. - 5. Composition Morphology and Structure of Thin Films. - 5. 1 Methods for Determination of Chemical Composition of Films. - 5. 2 Electron Microscopy of Thin Films. - 5. 3 Diffraction of Electrons. - 5. 4 X-ray Methods. - 5. 5 Auger Spectroscopy. - 6. Properties of Thin Films. - 6. 1 Mechanical Properties. - 6. 2 Electrical and Magnetic Properties of Thin Films. - 6. 3 Optical Properties of Thin Films. - 7. Application of This Films. - 7. 1 Optical Applications. - 7. 2 Applications in Electronics. - References. Language: English